The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering
نویسندگان
چکیده
Titanium oxide nanoparticles have been synthesized via sputtering of a hollow cathode in an argon atmosphere. The influence of pressure and gas flow has been studied. Changing the pressure effects the nanoparticle size, increasing approximately proportional to the pressure squared. The influence of gas flow is dependent on the pressure. In the low pressure regime (107 ≤ p ≤ 143 Pa) the nanoparticle size decreases with increasing gas flow, however at high pressure (p = 215 Pa) the trend is reversed. For low pressures and high gas flows it was necessary to add oxygen for the particles to nucleate. There is also a morphological transition of the nanoparticle shape that is dependent on the pressure. Shapes such as faceted, cubic and cauliflower can be obtained.
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